Publication | Closed Access
Structural and surface characterization of large diameter, crystalline AlN substrates for device fabrication
36
Citations
11
References
2007
Year
Materials ScienceSurface CharacterizationAluminium NitrideLarge DiameterEngineeringMicrofabricationSurface ScienceApplied PhysicsSurface EngineeringCrystalline AlnDevice FabricationMicrostructureSurface Processing
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