Investigation of laser induced diffusion and annealing processes of arsenic-implanted silicon crystals - Concepedia

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Investigation of laser induced diffusion and annealing processes of arsenic-implanted silicon crystals

34

Citations

1

References

1977

Year

H.‐D. Geiler, G. Götz, K.-D. Klinge, N. Triem

physica status solidi (a)

Materials ScienceEngineeringApplied PhysicsSemiconductor Device FabricationLaser-assisted DepositionAmorphous SolidPulsed Laser DepositionArsenic-implanted Silicon CrystalsOptoelectronicsSilicon On Insulator

References

	Year	Citations

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