Concepedia

Rapid thermal chemical vapour deposition of SiOxNy films

F. Lebland, Christian Licoppe, Y. Gao, Y. I. Nissim, S. Rigo

Applied Surface Science · 1992 · 14 citations · 2 references

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Concepts

References

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceHeat TransferPhysical ChemistryThin FilmsChemical Vapor DepositionCoatingsPhysical Vapor DepositionThermal Properties Of SemiconductorsThin Film Thermal PropertiesThin-film DepositionChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsFilm DepositionVapour Diffusion

References

2

The preparation, characterization and applications of silicon nitride thin films

C.E. MOROSANU · Thin Solid Films · 1980 · 171 citations

Natural Sciences, Materials Engineering, Materials Science +12

Photo-assisted deposition of thin films on III–V semiconductors with UV and IR lamps

Y. I. Nissim, J. M. Moison, F. Houzay et al. · Applied Surface Science · 1990 · 25 citations

Engineering, Materials Engineering, Materials Science +15