Characterization of thin titanium oxide adhesion layers on gold: resistivity, morphology, and composition

Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids

M. P. Seah, W. A. Dench · Surface and Interface Analysis · 1979 · 5.3K citations

Natural Sciences, Materials Science, Physics +17

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Thin Films—Interdiffusion and Reactions

J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations

Natural Sciences, Materials Engineering, Materials Science +12

Quantitative chemical analysis by ESCA

David R. Penn · Journal of Electron Spectroscopy and Related Phenomena · 1976 · 923 citations

Natural Sciences, Chemistry, Analytical Chemistry +8

Fundamentals of surface and thin film analysis

L. C. Feldman, James W. Mayer, F. Adams · Analytica Chimica Acta · 1989 · 911 citations

Natural Sciences, Materials Engineering, Materials Science +12