2002 · 37 citations · 0 references
EngineeringElectrical EngineeringPackaging DesignSemiconductor DevicesSensorsChip PackagingIntegrated Circuit DevicesIntegrated Circuit FabricationPackaging EngineeringSensor IntegrationWafer BondingAdvanced PackagingDevice PackagingIntegrated Sensor DesignSensor PackagingSiliconThrough-silicon ViasWafer-level Packaging
Low cost packaging for integrated sensor devices is key to the ingress of silicon sensors into the consumer and industrial marketplace. Wafer-level packaging for integrated sensors can be performed using several technologies. The benefits and challenges of several these technologies are described.