Line width tuning and smoothening for periodical grating fabrication in nanoimprint lithography

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Theory and applications of guided-mode resonance filters

S. S. Wang, Robert Magnusson · Applied Optics · 1993 · 1.2K citations

Engineering, Electrical Engineering, Optics +16

Organic Solar Cells Using Nanoimprinted Transparent Metal Electrodes

Myung‐Gyu Kang, Myung‐Su Kim, Jinsang Kim et al. · Advanced Materials · 2008 · 523 citations

Engineering, Materials Engineering, Materials Science +17

Theoretical analysis of subwavelength high contrast grating reflectors

Vadim Karagodsky, Forrest Sedgwick, Connie J. Chang-Hasnain · Optics Express · 2010 · 297 citations · Full text

Natural Sciences, Materials Science, Optical Materials +11

Immersion lithography at 157 nm

M. Switkes, M. Rothschild · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 115 citations

Engineering, Materials Engineering, Materials Science +8