2004 · 54 citations · 6 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsVibrationMems DesignMems ResonatorsMems TestingOscillatorsRf MemsMicroelectromechanical OscillatorsMicromechanical OscillatorsPhase NoiseRf Mems Resonators
A reference oscillator utilizing a 60MHz, MEMS-based, wine glass disk vibrating micromechanical resonator with a Q of 48,000 and sufficient power handling capability to achieve a far-from-carrier phase noise of -130dBc/Hz is demonstrated. When divided down to 10MHz, this corresponds to an effective level of -145dBc/Hz.
6
A 12 MHz micromechanical bulk acoustic mode oscillator
T. Mattila, Jyrki Kiihamäki, T. Lamminmäki et al. · Sensors and Actuators A Physical · 2002 · 147 citations