60-MHz wine-glass micromechanical-disk reference oscillator

Abstract

A reference oscillator utilizing a 60MHz, MEMS-based, wine glass disk vibrating micromechanical resonator with a Q of 48,000 and sufficient power handling capability to achieve a far-from-carrier phase noise of -130dBc/Hz is demonstrated. When divided down to 10MHz, this corresponds to an effective level of -145dBc/Hz.