2002 · 13 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsComplementary Metal-oxide-semiconductor TechnologyIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationMixed-signal Integrated Circuit DesignSemiconductor Device MaterialsBicmos TechnologyCmos Radio-frequency CircuitsCopper MetallizationLinearityMetallizationNitride Thin FilmsNitrides Thin FilmsResistors
Metal thin film resistors have been integrated into a damascene-copper multilayer metallization system for mixed-signal BiCMOS technology platforms. The thin film process can be adjusted to achieve resistors with very low temperature coefficients, high linearity, low noise, and improved matching as compared to resistors based on implanted silicon or polysilicon processing. In addition, improvement in terms of good RF performance was observed.