2002 · 20 citations · 2 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationActuator DesignElectrostatic ActuationElectrostatic ActuatorsMems ActuatorsMems DesignMicromachiningDisplacementElectrostatic Mems ActuatorsElectrostatic MicroactuatorsImpact ForceLarge-displacement ActuationMicroactuatorsMicroelectromechanical ActuatorsMiniature Actuators
A fully packagable micromachined actuator was developed for generating precise but unlimited displacement. A suspended silicon mass is encapsulated between glass plates and driven by electrostatic force. By hitting a stopper, it generates impact force to drive the whole actuator in a small step (/spl sim/10 nm). It is a micromachined and electrostatic version of the impact-drive actuator.
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