A 4Mb DRAM with cross point trench transistor cell

Abstract

This report will describe the design of a 9.8mm×10.2mm 1MW×4b DRAM fabricated in a 1μm double-level metal CMOS technology featuring trench-transistor cells measuring 9μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . Row and static column access times are 170ns and 30ns, respectively.