Concepedia

Electro-Mechanical Transducer for MEMS Analysis in ANSYS

M. Gyimesi, D. Ostergaard

1999 · 14 citations · 2 references

Concepts

EngineeringElectrical EngineeringMechanical EngineeringInstrumentationMicroelectromechanical SystemsSensorsElectromechanical SystemsMems CharacterizationMems ModelingMems SimulationMems TestingMicroelectromechanical SensorsElectromechanical TransductionMechanical Testing Of Mems DevicesMems Failure AnalysisTransducer DesignVibration Testing Of Mems Devices

Abstract

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

References

2

A Relaxation/Multipole-Accelerated Scheme for Self-Consistent Electromechanical Analysis of Complex 3-D Microelectromechanical Structures

1993 · 26 citations

Engineering, Electrical Engineering, Mechanical Engineering +10

Optimal design and noise consideration of micromachined vibrating rate gyroscope with modulated integrative differential optical sensing

Ofir Degani, D. Seter, Eran Socher et al. · Journal of Microelectromechanical Systems · 1998 · 20 citations

Engineering, Electrical Engineering, Mechanical Engineering +17