Undercut Formation

Undercut Formation is a phenomenon in microfabrication processes wherein selective etching of a sacrificial layer beneath a thin film results in lateral removal of material, leading to the creation of a void or overhang structure due to the etchant's isotropic attack under the protected regions of the film.

56

Publications

2.3K

Citations

186

Authors

75

Institutions

Publications per year

2017–2026

11

Authors

186

  1. NB
    N. Bogdanski

    University of Wuppertal, Germany

    3 publications · 80 citations

    3

    h-index

  2. RZ
    Ran Zong

    Shandong University, China

    2 publications · 67 citations

    2

    h-index

  3. AK
    Alexander Kaplan

    Luleå University of Technology, Sweden

    2 publications · 85 citations

    2

    h-index

  4. DR
    D. R. Hall

    Heriot-Watt University, United Kingdom

    2 publications · 28 citations

    2

    h-index

  5. SS
    Sajal Singh

    Indian Institute of Technology Hyderabad, India

    2 publications · 47 citations

    2

    h-index

1–5 of 186

Venues

  1. 5

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  2. Microelectronic Engineering

    4 publications · 142 citations

    4

    h-index

  3. Journal of Laser Applications

    3 publications · 59 citations

    3

    h-index

  4. Journal of The Electrochemical Society

    JES · 2 publications · 33 citations

    2

    h-index

  5. IEEE Electron Device Letters

    2 publications · 42 citations

    2

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1–5