Concepedia

Step Height Measurement

Step Height Measurement is a metrological technique in microfabrication that quantifies the vertical distance between two adjacent, nominally flat surfaces on a microstructured device, distinguished by its specificity to topographic discontinuities at the micro- or nanoscale.

169

Publications

6.3K

Citations

611

Authors

221

Institutions

Publications per year

2017–2026

25

Parents

Publications

169

Observation of vacuum tunneling of spin-polarized electrons with the scanning tunneling microscope

R. Wiesendanger, H.‐J. Güntherodt, G. Güntherodt et al. · Physical Review Letters · 1990 · 590 citations

, , +17

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> scanning tunneling microscopy of platinum (111) surface with the observation of monatomic steps

Kingo Itaya, Shizuo Sugawara, K. Sashikata et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 206 citations

, , +14

Surface measurement errors using commercial scanning white light interferometers

Feng Gao, Richard Leach, Jon N. Petzing et al. · Measurement Science and Technology · 2007 · 197 citations · Full text

, , +16

Fringe modulation skewing effect in white-light vertical scanning interferometry

Akiko Harasaki, James C. Wyant · Applied Optics · 2000 · 165 citations

, , +14

Amorphization and recrystallization of 6H-SiC by ion-beam irradiation

V. Heera, J. Stoëmenos, R. Kögler et al. · Journal of Applied Physics · 1995 · 157 citations

, , +17

1–5 of 169

Authors

611

  1. TV
    Theodore V. Vorburger

    National Institute of Standards and Technology, United States

    9 publications · 254 citations

    9

    h-index

  2. RG
    Ronald G. Dixson

    National Institute of Standards and Technology, United States

    9 publications · 223 citations

    9

    h-index

  3. JF
    Joseph Fu

    National Institute of Standards and Technology, United States

    7 publications · 214 citations

    7

    h-index

  4. ED
    Ellen D. Williams

    University of Maryland, College Park, United States

    5 publications · 251 citations

    5

    h-index

  5. LK
    Ludger Koenders

    Physikalisch-Technische Bundesanstalt, Germany

    4 publications · 168 citations

    4

    h-index

1–5 of 611

Institutions

221

  1. National Institute of Standards and Technology

    Gaithersburg, United States

    14 h-index

    58 publications

    1.8K citations

  2. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    8 h-index

    18 publications

    736 citations

  3. National Physical Laboratory

    London, United Kingdom

    6 h-index

    16 publications

    698 citations

  4. Tianjin University

    Tianjin, China

    5 h-index

    5 publications

    97 citations

  5. Korea Research Institute of Standards and Science

    Daejeon, South Korea

    5 h-index

    8 publications

    233 citations

  6. University of Maryland, College Park

    College Park, United States

    5 h-index

    11 publications

    598 citations

  7. University of Electro-Communications

    Tokyo, Japan

    4 h-index

    10 publications

    295 citations

  8. Tohoku University

    Sendai, Japan

    4 h-index

    9 publications

    782 citations

1–8 of 221

Venues

  1. 14

    h-index

  2. Measurement Science and Technology

    14 publications · 658 citations

    12

    h-index

  3. Applied Optics

    12 publications · 632 citations

    12

    h-index

  4. Optics Express

    7 publications · 216 citations

    7

    h-index

  5. Metrologia

    5 publications · 123 citations

    5

    h-index

1–5