Concepedia

Self-sputtering

Self-Sputtering is a plasma-wall interaction phenomenon in which ions of a particular material, generated within the plasma, are accelerated toward the same material’s surface, causing the ejection of additional atoms or ions of that material through momentum transfer.

109

Publications

6.1K

Citations

329

Authors

132

Institutions

Publications per year

2017–2026

13

Parents

Publications

109

Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)

André Anders · Journal of Applied Physics · 2017 · 397 citations · Full text

, , +17

High power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering

André Anders, Joakim Andersson, Arutiun P. Ehiasarian · Journal of Applied Physics · 2007 · 345 citations · Full text

, , +14

Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017

J. E. Greene · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 324 citations · Full text

, , +15

Universal energy dependence of physical and ion-enhanced chemical etch yields at low ion energy

Christoph Steinbrüchel · Applied Physics Letters · 1989 · 287 citations

, , +14

Deposition rates of high power impulse magnetron sputtering: Physics and economics

André Anders · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 222 citations

, , +13

1–5 of 109

Authors

329

  1. AA
    André Anders

    Lawrence Berkeley National Laboratory, United States

    16 publications · 1.8K citations

    15

    h-index

  2. DL
    Daniel Lundin

    Linköping University, Sweden

    4 publications · 320 citations

    4

    h-index

  3. MA
    M. A. Raadu

    KTH Royal Institute of Technology, Sweden

    3 publications · 283 citations

    3

    h-index

  4. ZJ
    Z. J. Radzimski

    North Carolina State University, United States

    3 publications · 169 citations

    3

    h-index

  5. JA
    Joakim Andersson

    Uppsala University, Sweden

    3 publications · 498 citations

    3

    h-index

1–5 of 329

Institutions

132

  1. Lawrence Berkeley National Laboratory

    Berkeley, United States

    15 h-index

    28 publications

    2.5K citations

  2. Max Planck Institute for Plasma Physics

    Garching, Germany

    6 h-index

    17 publications

    909 citations

  3. University of Iceland

    Reykjavik, Iceland

    5 h-index

    10 publications

    556 citations

  4. Centre National de la Recherche Scientifique

    Paris, France

    5 h-index

    8 publications

    687 citations

  5. Laboratoire de Physique des Gaz et des Plasmas

    Orsay, France

    4 h-index

    13 publications

    892 citations

  6. Wrocław University of Science and Technology

    Wroclaw, Poland

    4 h-index

    4 publications

    192 citations

  7. Max Planck Society

    Munich, Germany

    4 h-index

    9 publications

    417 citations

  8. KTH Royal Institute of Technology

    Stockholm, Sweden

    4 h-index

    13 publications

    1.2K citations

1–8 of 132

Venues

  1. Journal of Applied Physics

    14 publications · 1.4K citations

    13

    h-index

  2. 11

    h-index

  3. Applied Physics Letters

    9 publications · 717 citations

    9

    h-index

  4. Vacuum

    8 publications · 237 citations

    8

    h-index

  5. Journal of Physics D Applied Physics

    5 publications · 314 citations

    5

    h-index

1–5