Concepedia

Patterned Sacrificial Layers

Patterned Sacrificial Layers is a microfabrication technique in which a selectively deposited and lithographically defined sacrificial material is used to create temporary, spatially confined structural supports that are subsequently removed to enable the formation of suspended or free-standing microscale components in layered device architectures.

23

Publications

939

Citations

104

Authors

47

Institutions

Publications per year

2017–2026

2

Parents

Publications

23

Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells

Gaoshan Huang, Yongfeng Mei, Dominic J. Thurmer et al. · Lab on a Chip · 2008 · 139 citations

, , +16

Using Elastomeric Membranes as Dry Resists and for Dry Lift-Off

Rebecca J. Jackman, David C. Duffy, Oksana Cherniavskaya et al. · Langmuir · 1999 · 113 citations

, , +17

Heat-depolymerizable polycarbonates as electron beam patternable sacrificial layers for nanofluidics

C. K. Harnett, Geoffrey W. Coates, H. G. Craighead · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 85 citations

, , +17

Direct nanometer scale patterning of SiO2 with electron beam irradiation through a sacrificial layer

David R. Allee, A. N. Broers · Applied Physics Letters · 1990 · 74 citations

, , +17

Uncrosslinked SU-8 as a sacrificial material

Charles C. Chung, Mark G. Allen · Journal of Micromechanics and Microengineering · 2004 · 67 citations

, , +15

1–5 of 23

Authors

104

  1. HC
    Henri Camon

    Laboratoire d'Analyse et d'Architecture des Systèmes, France

    1 publications · 11 citations

    1

    h-index

  2. PW
    Peihong Wang

    Anhui University, China

    1 publications · 21 citations

    1

    h-index

  3. VC
    Véronique Conédéra

    Laboratoire d'Analyse et d'Architecture des Systèmes, France

    1 publications · 11 citations

    1

    h-index

  4. SJ
    Sang-Baek Ju

    Daewoo Electronics (South Korea), South Korea

    1 publications · 15 citations

    1

    h-index

  5. SK
    Sang‐Gook Kim

    Massachusetts Institute of Technology, United States

    1 publications · 15 citations

    1

    h-index

1–5 of 104

Institutions

47

  1. Simon Fraser University

    Burnaby, Canada

    2 h-index

    6 publications

    232 citations

  2. Eindhoven University of Technology

    Eindhoven, The Netherlands

    1 h-index

    1 publications

    33 citations

  3. National Taipei University

    Taipei, Taiwan

    1 h-index

    3 publications

    30 citations

  4. Laboratoire d'Analyse et d'Architecture des Systèmes

    Toulouse, France

    1 h-index

    4 publications

    44 citations

  5. Technical University of Munich

    Munich, Germany

    1 h-index

    2 publications

    36 citations

  6. Institut Polytechnique de Bordeaux

    Bordeaux, France

    1 h-index

    5 publications

    175 citations

  7. San’an Optoelectronics (China)

    Tianjin, China

    1 h-index

    2 publications

    52 citations

  8. Pusan National University

    Busan, South Korea

    1 h-index

    3 publications

    48 citations

1–8 of 47

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 4 publications · 162 citations

    4

    h-index

  2. 1

    h-index

  3. Electrochemical and Solid-State Letters

    1 publications · 10 citations

    1

    h-index

  4. Sensors and Actuators A Physical

    1 publications · 18 citations

    1

    h-index

  5. Scientific Reports

    1 publications · 26 citations

    1

    h-index

1–5