Concepedia

Pattern Transfer Resolution

Pattern Transfer Resolution is a metric that quantifies the fidelity with which a designed pattern is accurately replicated from a resist or mask layer into the underlying thin film during nanoscale fabrication processes, distinguishing itself by specifically evaluating the smallest feature size and positional accuracy achievable in the transferred pattern.

39

Publications

4.2K

Citations

195

Authors

69

Institutions

Publications per year

2017–2026

7

Parents

Publications

39

Inkjet Printing of Functional and Structural Materials: Fluid Property Requirements, Feature Stability, and Resolution

Brian Derby · Annual Review of Materials Research · 2010 · 1.9K citations · Full text

, , +13

Interfacial Chemistries for Nanoscale Transfer Printing

Yueh‐Lin Loo, R. L. Willett, K. W. Baldwin et al. · Journal of the American Chemical Society · 2002 · 404 citations

, , +17

Roller nanoimprint lithography

Hua Tan, Andrew Gilbertson, Stephen Y. Chou · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 313 citations

, , +9

Nanoimprint lithography at the 6 in. wafer scale

Babak Heidari, Ivan Maximov, Lars Montelius · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 125 citations

, , +14

Sub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography

Colin Rawlings, Heiko Wolf, Martin Spieser et al. · ACS Nano · 2017 · 110 citations · Full text

, , +13

1–5 of 39

Authors

195

  1. SR
    Stephen R. Forrest

    Princeton University, United States

    2 publications · 134 citations

    2

    h-index

  2. AW
    Armin W. Knoll

    IBM Research - Zurich, Switzerland

    2 publications · 133 citations

    2

    h-index

  3. PP
    Peter Peumans

    Stanford University, United States

    2 publications · 134 citations

    2

    h-index

  4. JK
    Joel K. W. Yang

    Singapore University of Technology and Design, Singapore

    2 publications · 116 citations

    2

    h-index

  5. JB
    Jay B. Benziger

    Princeton University, United States

    2 publications · 134 citations

    2

    h-index

1–5 of 195

Institutions

69

  1. IMEC

    Leuven, Belgium

    3 h-index

    19 publications

    332 citations

  2. Princeton University

    Princeton, United States

    3 h-index

    10 publications

    1.2K citations

  3. IBM Research - Zurich

    Rüschlikon, Switzerland

    2 h-index

    8 publications

    706 citations

  4. Paul Scherrer Institute

    Villigen, Switzerland

    2 h-index

    8 publications

    256 citations

  5. SwissLitho (Switzerland)

    Zurich, Switzerland

    2 h-index

    4 publications

    353 citations

  6. Agency for Science, Technology and Research

    Singapore, Singapore

    1 h-index

    3 publications

    207 citations

  7. Samsung (South Korea)

    Seoul, South Korea

    1 h-index

    2 publications

    34 citations

  8. Shipley Hospital

    Shipley, United Kingdom

    1 h-index

    2 publications

    84 citations

1–8 of 69

Venues

  1. 6

    h-index

  2. Advanced Functional Materials

    3 publications · 176 citations

    3

    h-index

  3. 3

    h-index

  4. Nanotechnology

    2 publications · 103 citations

    2

    h-index

  5. Microelectronic Engineering

    2 publications · 59 citations

    2

    h-index

1–5