Concepedia

Minienvironment Systems

Minienvironment Systems is a controlled atmospheric enclosure technology that isolates critical processing zones within semiconductor manufacturing equipment by maintaining ultra-clean internal conditions through localized filtration, pressurization, and airflow management, thereby minimizing particulate contamination of wafers during transfer and processing.

9

Publications

195

Citations

20

Authors

7

Institutions

Publications per year

2017–2026

0

Variants

Minienvironments

Parents

Publications

9

Design and evaluation of a minienvironment for semiconductor manufacture processes

Shih-Cheng Hu, Yew Khoy Chuah, M.C. Yen · Building and Environment · 2002 · 53 citations

, , +12

Characterization of minienvironments in a clean room: Design characteristics and environmental performance

Tengfang Xu · Building and Environment · 2006 · 39 citations

, , +16

Characterization of minienvironments in a cleanroom: Assessing energy performance and its implications

Tengfang Xu · Building and Environment · 2008 · 26 citations

, , +11

Contaminant particles removal by negative air ionic cleaner in industrial minienvironment for IC manufacturing processes

Angus Shiue, Shih-Cheng Hu · Building and Environment · 2011 · 21 citations

, , +14

Computer‐assisted Social Skills Learning for Adolescents with Mild Retardation and Social Difficulties

Malka Margalit, Amatzia Weisel · Educational Psychology · 1990 · 13 citations

, , +15

1–5 of 9

Authors

20

  1. SH
    Shih-Cheng Hu

    National Taipei University of Technology, Taiwan

    4 publications · 94 citations

    4

    h-index

  2. TX
    Tengfang Xu

    Lawrence Berkeley National Laboratory, United States

    2 publications · 65 citations

    2

    h-index

  3. KT
    K. Tokunaga

    Hitachi (Japan), Japan

    1 publications · 12 citations

    1

    h-index

  4. MM
    Malka Margalit

    Tel Aviv University, Israel

    1 publications · 13 citations

    1

    h-index

  5. MY
    M.C. Yen

    National Taipei University of Technology, Taiwan

    1 publications · 53 citations

    1

    h-index

1–5 of 20

Institutions

7

  1. National Taipei University of Technology

    Taipei, Taiwan

    4 h-index

    8 publications

    231 citations

  2. Lawrence Berkeley National Laboratory

    Berkeley, United States

    2 h-index

    2 publications

    65 citations

  3. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    1 h-index

    3 publications

    33 citations

  4. Tel Aviv University

    Tel Aviv, Israel

    1 h-index

    2 publications

    26 citations

  5. Industrial Technology Research Institute

    Hsinchu, Taiwan

    1 h-index

    1 publications

    10 citations

  6. Hitachi (Japan)

    Tokyo, Japan

    1 h-index

    4 publications

    48 citations

  7. Essex Westford School District

    Essex Junction, United States

    1 h-index

    2 publications

    22 citations

1–7 of 7

Venues

  1. Building and Environment

    4 publications · 139 citations

    4

    h-index

  2. 2

    h-index

  3. Educational Psychology

    1 publications · 13 citations

    1

    h-index

  4. Journal of the IEST

    1 publications · 11 citations

    1

    h-index

  5. Aerosol Science and Technology

    1 publications · 10 citations

    1

    h-index

1–5