Concepedia

Characterization of minienvironments in a clean room: Design characteristics and environmental performance

Building and Environment · 2006 · 39 citations · 6 references

Concepts

ArchitectureBuilding ScienceEnvironmental EngineeringBuilt EnvironmentIndoor Environmental QualitySustainable Building DesignCleanroom DesignIndoor Environmental ConditionsIndoor Thermal EnvironmentMicroclimate DesignThermal Comfort DesignVentilation Performance EvaluationClean Room DesignEnvironmental Performance IndexesEnvironmental Performance IndicatorsEnvironmental Performance ModelingEnvironmental Performance VerificationIndoor Environmental Quality OptimizationMinienvironment Systems

References

6

Design and evaluation of a minienvironment for semiconductor manufacture processes

Shih-Cheng Hu, Yew Khoy Chuah, M.C. Yen · Building and Environment · 2002 · 53 citations

Engineering, Industrial Engineering, Manufacturing Engineering +12

Characterization of minienvironments in a cleanroom: Assessing energy performance and its implications

Tengfang Xu · Building and Environment · 2008 · 26 citations

Architecture, Building Science, Environmental Engineering +11

Performance Evaluation of Cleanroom Environmental Systems

Tengfang Xu · Journal of the IEST · 2003 · 22 citations · Full text

Architecture, Building Science, Environmental Engineering +17

Considerations for Efficient Airflow Design in Cleanrooms

Tengfang Xu · Journal of the IEST · 2004 · 15 citations · Full text

Architecture, Architectural Engineering, Building Science +15

SEMATECH Minienvironment Benchmarking Project

Laura Rothman, Robert J. Miller, Richard Wang et al. · Journal of the IEST · 1995 · 11 citations

Engineering, Manufacturing Engineering, Materials Engineering +16