Concepedia

Microstructure Release Techniques

Microstructure Release Techniques is a sacrificial layer processing method that selectively removes underlying support materials to liberate microscale structures from the substrate while preserving their structural integrity and enabling controlled mobility or suspension in microelectromechanical systems.

20

Publications

864

Citations

106

Authors

34

Institutions

Publications per year

2017–2026

2

Parents

Publications

20

Review of polymer MEMS micromachining

Brian Kim, Ellis Meng · Journal of Micromechanics and Microengineering · 2015 · 148 citations

, , +17

Phase Separation Micromolding—PSμM

L. Vogelaar, J.N. Barsema, C.J.M. van Rijn et al. · Advanced Materials · 2003 · 131 citations

, , +12

Post-CMOS integration of germanium microstructures

Alexander Franke, D. Bilic, David T. Chang et al. · 1999 · 80 citations

, , +17

Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage

Che-Heung Kim, Hee-Moon Jeong, Jong-Up Jeon et al. · Journal of Microelectromechanical Systems · 2003 · 75 citations

, , +15

Effects of elevated temperature treatments in microstructure release procedures

Takeshi Abe, W. Messner, Michael L. Reed · Journal of Microelectromechanical Systems · 1995 · 71 citations

, , +12

1–5 of 20

Authors

106

  1. CH
    Carlos H. Mastrangelo

    University of Michigan, United States

    2 publications · 47 citations

    2

    h-index

  2. BG
    Bedanta Gogoi

    Institute of Advanced Study in Science and Technology, India

    2 publications · 47 citations

    2

    h-index

  3. ML
    Michael L. Reed

    Albert Einstein College of Medicine, United States

    2 publications · 97 citations

    2

    h-index

  4. EM
    Evgeniya Moiseeva

    University of Louisville, United States

    1 publications · 41 citations

    1

    h-index

  5. YK
    Yong‐Kweon Kim

    Seoul National University, South Korea

    1 publications · 75 citations

    1

    h-index

1–5 of 106

Institutions

34

  1. University of Michigan

    Ann Arbor, United States

    2 h-index

    4 publications

    94 citations

  2. University of California, Berkeley

    Berkeley, United States

    1 h-index

    4 publications

    320 citations

  3. Saarland University

    Saarbrücken, Germany

    1 h-index

    1 publications

    13 citations

  4. University of Twente

    Enschede, The Netherlands

    1 h-index

    2 publications

    262 citations

  5. Université Claude Bernard Lyon 1

    Villeurbanne, France

    1 h-index

    1 publications

    20 citations

  6. Umicore (Belgium)

    Brussels, Belgium

    1 h-index

    4 publications

    80 citations

  7. Carnegie Mellon University

    Pittsburgh, United States

    1 h-index

    3 publications

    213 citations

  8. Institut interdisciplinaire d'innovation technologique

    Sherbrooke, Canada

    1 h-index

    26 publications

    520 citations

1–8 of 34

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 6 publications · 270 citations

    6

    h-index

  2. Journal of Microelectromechanical Systems

    3 publications · 183 citations

    3

    h-index

  3. 2

    h-index

  4. Nanoscale Advances

    1 publications · 20 citations

    1

    h-index

  5. Advanced Materials

    1 publications · 131 citations

    1

    h-index

1–5