Publication | Closed Access
Phase Separation Micromolding—PSμM
131
Citations
15
References
2003
Year
EngineeringMechanical EngineeringPhase Separation MicromoldingStructural MaterialsMaterial ProcessingMaterials FabricationPhase Separation Micromolding—psμmBroad SpectrumMicroscale SystemPhase SeparationMicrofluidicsIntrinsic ShrinkageMaterials ScienceNanomanufacturingFabrication TechniqueNanostructuringMicro TechnologyMicrostructureMechanical PropertiesMicrofabricationApplied Physics
Microstructures from a broad spectrum of materials , ranging from polymers to ceramics and metals, can be fabricated by phase separation micromolding (PSμM), a generic microfabrication technique. PSμM offers the possibility to introduce porosity; the process benefits from intrinsic shrinkage, which facilitates the fabrication of completely open microstructures (see Figure), and also promotes defect‐free release of the microstructure.
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