Concepedia

Linear Electrostatic Actuators

Linear Electrostatic Actuators is a type of electrostatic actuator that converts electrical energy into linear mechanical motion through Coulomb forces generated by applied electric fields between charged electrodes, distinguished from other electrostatic actuators by its rectilinear displacement output.

39

Publications

1.9K

Citations

109

Authors

43

Institutions

Publications per year

2017–2026

5

Parents

Publications

39

A methodology and model for the pull-in parameters of electrostatic actuators

Y. Nemirovsky, O. Bochobza-Degani · Journal of Microelectromechanical Systems · 2001 · 236 citations

, , +17

Electrostatic micromechanical actuator with extended range of travel

Edward Chan, R.W. Dutton · Journal of Microelectromechanical Systems · 2000 · 201 citations

, , +17

Single mask, large force, and large displacement electrostatic linear inchworm motors

Richard Yeh, S. Hollar, Kristofer S. J. Pister · Journal of Microelectromechanical Systems · 2002 · 142 citations

, , +16

High-aspect-ratio micromachining via deep X-ray lithography

H. Guckel · Proceedings of the IEEE · 1998 · 140 citations

, , +15

A planar air levitated electrostatic actuator system

Kristofer S. J. Pister, Ronald S. Fearing, Roger T. Howe · 2002 · 131 citations

, , +17

1–5 of 39

Authors

109

  1. KS
    Kristofer S. J. Pister

    University of California, Berkeley, United States

    3 publications · 296 citations

    3

    h-index

  2. HF
    Hiroyuki Fujita

    The University of Tokyo, Japan

    3 publications · 103 citations

    3

    h-index

  3. YY
    Yisong Yang

    New York University, United States

    2 publications · 38 citations

    2

    h-index

  4. NR
    Niels R. Tas

    University of Twente, Netherlands

    2 publications · 39 citations

    2

    h-index

  5. RZ
    Ruifeng Zhang

    Drexel University, United States

    2 publications · 38 citations

    2

    h-index

1–5 of 109

Institutions

43

  1. The University of Tokyo

    Tokyo, Japan

    5 h-index

    9 publications

    395 citations

  2. University of California, Berkeley

    Berkeley, United States

    4 h-index

    13 publications

    960 citations

  3. Technion – Israel Institute of Technology

    Haifa, Israel

    3 h-index

    8 publications

    610 citations

  4. Kanagawa Academy of Science and Technology

    Kawasaki, Japan

    2 h-index

    3 publications

    135 citations

  5. Tokyo University of Science

    Tokyo, Japan

    2 h-index

    3 publications

    135 citations

  6. University of Twente

    Enschede, The Netherlands

    2 h-index

    9 publications

    179 citations

  7. Ritsumeikan University

    Kyoto, Japan

    2 h-index

    6 publications

    123 citations

  8. Northwestern Polytechnical University

    Xi'an, China

    1 h-index

    5 publications

    95 citations

1–8 of 43

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 6 publications · 120 citations

    6

    h-index

  2. Journal of Microelectromechanical Systems

    5 publications · 641 citations

    5

    h-index

  3. Sensors and Actuators A Physical

    2 publications · 103 citations

    2

    h-index

  4. 2

    h-index

  5. 2

    h-index

1–5