Concepedia

Fabrication-induced Variability

Fabrication-Induced Variability is a phenomenon in MEMS actuator manufacturing that refers to the unintended deviations in device performance or geometric parameters arising from inherent inconsistencies and tolerances in microfabrication processes.

62

Publications

2.1K

Citations

253

Authors

107

Institutions

Publications per year

2017–2026

16

Parents

Publications

62

Silicon photonics manufacturing

William A. Zortman, Douglas C. Trotter, Michael R. Watts · Optics Express · 2010 · 189 citations · Full text

, , +17

Electron spin resonance features of interface defects in thermal (100)Si/SiO2

A. Stesmans, V. V. Afanas’ev · Journal of Applied Physics · 1998 · 181 citations

, , +17

Characterizing process variation in nanometer CMOS

Kanak Agarwal, Sani Nassif · Proceedings - ACM IEEE Design Automation Conference · 2007 · 125 citations

, , +14

Fabrication robustness in BIC metasurfaces

Julius Kühne, Juan Wang, Thomas Weber et al. · Nanophotonics · 2021 · 123 citations · Full text

, , +17

Statistical reliability analysis under process variation and aging effects

Yinghai Lu, Li Shang, Hai Zhou et al. · 2009 · 101 citations

, , +17

1–5 of 62

Authors

253

  1. LS
    Li Shang

    University of Colorado Boulder, United States

    6 publications · 283 citations

    6

    h-index

  2. AS
    Ankur Srivastava

    University of Maryland, College Park, United States

    4 publications · 80 citations

    4

    h-index

  3. AR
    Alan R. Mickelson

    University of Colorado Boulder, United States

    3 publications · 128 citations

    3

    h-index

  4. SN
    Sani Nassif

    IBM Research - Austin, United States

    3 publications · 159 citations

    3

    h-index

  5. XC
    Xi Chen

    Nokia (United States), United States

    3 publications · 128 citations

    3

    h-index

1–5 of 253

Institutions

107

  1. University of Colorado Boulder

    Boulder, United States

    8 h-index

    28 publications

    1.2K citations

  2. University of Maryland, College Park

    College Park, United States

    4 h-index

    11 publications

    216 citations

  3. IMEC

    Leuven, Belgium

    3 h-index

    20 publications

    488 citations

  4. University of Colorado System

    Boulder, United States

    3 h-index

    3 publications

    155 citations

  5. Intel (United States)

    Santa Clara, United States

    3 h-index

    4 publications

    87 citations

  6. University of British Columbia

    Vancouver, Canada

    3 h-index

    5 publications

    129 citations

  7. Carnegie Mellon University

    Pittsburgh, United States

    3 h-index

    11 publications

    184 citations

  8. Massachusetts Institute of Technology

    Cambridge, United States

    2 h-index

    2 publications

    213 citations

1–8 of 107

Venues

  1. Optics Express

    2 publications · 233 citations

    2

    h-index

  2. Optics Letters

    2 publications · 40 citations

    2

    h-index

  3. 2

    h-index

  4. Journal of Microelectromechanical Systems

    2 publications · 72 citations

    2

    h-index

  5. Sensors and Actuators A Physical

    2 publications · 53 citations

    2

    h-index

1–5