Concepedia

Etching-based Pattern Transfer

Etching-Based Pattern Transfer is a thin-film patterning technique that belongs to the class of pattern transfer methods, distinguished by its use of selective material removal through chemical or physical etching processes to replicate a predefined mask pattern onto an underlying thin film with high spatial fidelity.

38

Publications

1.1K

Citations

202

Authors

54

Institutions

Publications per year

2017–2026

0

Parents

Publications

38

A universal etching-free transfer of MoS2 films for applications in photodetectors

Donglin Ma, Jianping Shi, Qingqing Ji et al. · Nano Research · 2015 · 111 citations

, , +14

Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology

N. Vourdas, Dimitrios Kontziampasis, George Kokkoris et al. · Nanotechnology · 2010 · 56 citations

, , +17

Perspectives in nanoscale plasma etching: what are the ultimate limits?

Nathan Marchack, Jane P. Chang · Journal of Physics D Applied Physics · 2011 · 51 citations

, , +17

Universal pattern transfer methods for metal nanostructures by block copolymer lithography

Kun‐Hua Tu, Wubin Bai, George Liontos et al. · Nanotechnology · 2015 · 50 citations

, , +17

A Strategy for Patterning Conducting Polymers Using Nanoimprint Lithography and Isotropic Plasma Etching

Chunyu Huang, Bin Dong, Nan Lü et al. · Small · 2009 · 49 citations

, , +17

1–5 of 38

Authors

202

  1. NV
    N. Vourdas

    National Centre of Scientific Research "Demokritos", Greece

    2 publications · 80 citations

    2

    h-index

  2. AT
    A. Tserepi

    National Centre of Scientific Research "Demokritos", Greece

    2 publications · 80 citations

    2

    h-index

  3. ME
    M.E. Elta

    University of Michigan, United States

    1 publications · 23 citations

    1

    h-index

  4. RT
    Raluca Tiron

    Commissariat à l'Énergie Atomique et aux Énergies Alternatives, France

    1 publications · 21 citations

    1

    h-index

  5. DK
    Dimitrios Kontziampasis

    National Centre of Scientific Research "Demokritos", Greece

    1 publications · 56 citations

    1

    h-index

1–5 of 202

Institutions

54

  1. Massachusetts Institute of Technology

    Cambridge, United States

    2 h-index

    10 publications

    276 citations

  2. National Centre of Scientific Research "Demokritos"

    Athens, Greece

    2 h-index

    8 publications

    352 citations

  3. Sandia National Laboratories California

    Livermore, United States

    1 h-index

    3 publications

    90 citations

  4. Vavilov Institute of General Genetics

    Moscow, Russia

    1 h-index

    3 publications

    84 citations

  5. University of Science and Technology of China

    Hefei, China

    1 h-index

    5 publications

    190 citations

  6. Laboratoire d'Électronique des Technologies de l'Information

    Grenoble, France

    1 h-index

    8 publications

    168 citations

  7. CeNTech

    Münster, Germany

    1 h-index

    1 publications

    49 citations

  8. UNSW Sydney

    Sydney, Australia

    1 h-index

    2 publications

    76 citations

1–8 of 54

Venues

  1. 4

    h-index

  2. 4

    h-index

  3. Microelectronic Engineering

    3 publications · 86 citations

    3

    h-index

  4. Nanotechnology

    3 publications · 129 citations

    3

    h-index

  5. Journal of Micromechanics and Microengineering

    JMM · 3 publications · 45 citations

    3

    h-index

1–5