Statistics
Publications
3
Citations
89
H-Index
3
Active since
1987
Affiliations
The University of Tokyo(Current)
Nobuhiko Inoue is an author at The University of Tokyo specializing in natural sciences, materials chemistry, and materials engineering.
Publications per year
1987–2005
3
3
Highly selective low-damage processes using advanced neutral beams for porous low-k films
Hiroto Ohtake, Nobuhiko Inoue, Takuya Ozaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 25 citations
Natural Sciences, Materials Engineering, Materials Science +15
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