Statistics
Publications
4
Citations
108
H-Index
4
Active since
2013
Affiliations
ASML (Netherlands)(Current)
Matthew McLaren is an author at ASML (Netherlands) specializing in overlay accuracy, manufacturing engineering, and engineering.
Publications per year
2013–2021
4
4
NXT:1980Di immersion scanner for 7nm and 5nm production nodes
Roelof de Graaf, Stefan Weichselbaum, Richard Droste et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 13 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
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