Statistics
Publications
2
Citations
29
H-Index
2
Active since
2012
Affiliations
ASML (Netherlands)(Current)
Stefan Weichselbaum is an author at ASML (Netherlands) specializing in engineering, immersion lithography, and manufacturing engineering.
Publications per year
2012–2016
2
2
NXT:1980Di immersion scanner for 7nm and 5nm production nodes
Roelof de Graaf, Stefan Weichselbaum, Richard Droste et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 13 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
1–2 of 2