Fang-Sung Cheng

Direct imprinting using soft mold and gas pressure for large area and curved surfaces

Jer-Haur Chang, Fang-Sung Cheng, Chi-Chung Chao et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 50 citations

Materials Science, Large Area, Engineering +14

Fabrication of microlens arrays using UV micro-stamping with soft roller and gas-pressurized platform

Sen-Yeu Yang, Fang-Sung Cheng, Shuwen Xu et al. · Microelectronic Engineering · 2007 · 37 citations

Materials Science, Engineering, Soft Roller +9

Soft mold and gasbag pressure mechanism for patterning submicron patterns onto a large concave substrate

Fang-Sung Cheng, Sen‐Yeu Yang, Shih‐Chih Nian et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 21 citations

Engineering, Mechanical Engineering, Pattern Transfer +20

Novel hydrostatic pressuring mechanism for soft UV-imprinting processes

Fang-Sung Cheng, Sen‐Yeu Yang, Chien‐Chang Chen · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 11 citations

Soft Uv-imprinting Processes, Engineering, Microfabrication +15