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Diana Fu

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Publications

1

Citations

23

H-Index

1

Active since

1996

Affiliations

Stanford University(Current)

Diana Fu is an author at Stanford University specializing in applied physics, engineering, and synchrotron radiation.

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Publications per year

1996–1996

1

Publications

1

Measurement of the backscatter coefficient using resist response curves for 20–100 keV electron beam lithography on Si

G. P. Watson, Diana Fu, Steven D. Berger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 23 citations

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