Concepedia

Julien Fournier

JF

4

Publications

122

Citations

4

H-Index

1987

Active since

Affiliations

University of Michigan(Current)

Julien Fournier is an author at University of Michigan specializing in engineering, electrical engineering, and microfabrication.

Top concepts

EngineeringElectrical EngineeringMicrofabricationFlow ControlApplied PhysicsControl SystemsProcess ControlMicroelectronicsSystems EngineeringPhysics

Publications per year

1987–1999

4

Publications

4

Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher

B.A. Rashap, Stéphane Lafortune, James Moyne et al. · IEEE Transactions on Semiconductor Manufacturing · 1995 · 73 citations

Engineering, Flow Control, Real-time Control Technology +20

Real-time feedback control of reactive ion etching

M.E. Elta, Julien Fournier, J.S. Freudenberg et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 21 citations

Electrical Engineering, Engineering, Flow Control +14

The Gaseous Electronic Conference (GEC) reference cell as a benchmark for understanding microelectronics processing plasmas

M.L. Brake, J. Pender, Julien Fournier · Physics of Plasmas · 1999 · 17 citations · Full text

Engineering, Plasma Physics, Plasma Processing +16

Crucial parameters and device physics of amorphous silicon alloy tandem solar cells

Jeffrey Yang, T. Glatfelter, Robert Ross et al. · Journal of Non-Crystalline Solids · 1987 · 11 citations

Materials Science, Electrical Engineering, Engineering +10

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