Statistics
Publications
2
Citations
71
H-Index
2
Active since
1999
Affiliations
IBM (United States)(Current)
Samuel Doran is an author at IBM (United States) specializing in projection lithography, optics, and electron beam focusing.
Publications per year
1999–1999
2
2
Projection reduction exposure with variable axis immersion lenses: Next generation lithography
H. C. Pfeiffer, R. S. Dhaliwal, S. D. Golladay et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 61 citations
Natural Sciences, Manufacturing Engineering, Biomedical Optics +11
1–2 of 2