G. Mueller - Concepedia

Author

G. Mueller

Also Known As

G. M. Mueller, G. Mueller, George Mueller

Publications

104

Citations

H-Index

Concepts

All Affiliations

G. Mueller is an author at Lam Research (United States) specializing in surface science, microelectronics, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	94
2	Applied Physics	1	1	84
3	Chemical Engineering	1	1	10
4	Electrical Engineering	1	1	84
5	Materials Engineering	1	1	10

G. Mueller

Publications

Citations

H-Index

Page 1

	Year	Citations
High selectivity plasma etching of silicon dioxide with a dual frequency 27/2 MHz capacitive radio frequency discharge Wen–Yu Tsai, G. Mueller, Robert G. Lindquist, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Electrical EngineeringPlasma ElectronicsLangmuir Probe MeasurementEngineeringCf2 Radical	1996	84
Oxide Dual Damascene Trench Etch Profile Control D. Keil, B. A. Helmer, G. Mueller, Journal of The Electrochemical Society Materials ScienceMaterials EngineeringChemical EngineeringEngineeringProfile Modification	2001	10

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