G. Mueller is an author at Lam Research (United States) specializing in surface science, microelectronics, and engineering.
Top concepts
EngineeringSurface ScienceMicroelectronicsPulse PowerApplied PhysicsMaterial ScienceNuclear ReactorsChemical KineticsChemical EngineeringProfile Modification
Publications per year
1996–2001
2
2
Oxide Dual Damascene Trench Etch Profile Control
D. Keil, B. A. Helmer, G. Mueller et al. · Journal of The Electrochemical Society · 2001 · 10 citations
Materials Science, Materials Engineering, Chemical Engineering +11
Rows per page
1–2 of 2