Concepedia

K. M. Tan

KM

Statistics

Publications

3

Citations

60

H-Index

3

Active since

2003

Affiliations

National University of Singapore(Current)

Institute of Microelectronics

K. M. Tan is an author at National University of Singapore specializing in electrical engineering, applied physics, and microelectronics.

Top concepts

Publications per year

2003–2008

3

Publications

3

Strained N-Channel FinFETs with 25 nm Gate Length and Silicon-Carbon Source/Drain Regions for Performance Enhancement

T. Y. Liow, K. M. Tan, R. Lee et al. · 2006 · 31 citations

, , +11

Pulsed Laser Annealing of Silicon-Carbon Source/Drain in MuGFETs for Enhanced Dopant Activation and High Substitutional Carbon Concentration

Alvin Tian-Yi Koh, Rinus Tek-Po Lee, Fangyue Liu et al. · IEEE Electron Device Letters · 2008 · 18 citations

, , +14

Formation of polycrystalline silicon germanium/HfO2 gate stack structure using inductively coupled plasma etching

Jinghao Chen, K. M. Tan, Nan Wu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 11 citations

, , +15

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