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Jinghao Chen

JC

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Publications

1

Citations

11

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1

Active since

2003

Affiliations

National University of Singapore(Current)

Jinghao Chen is an author at National University of Singapore specializing in electronic devices, applied physics, and integrated circuits.

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Publications per year

2003–2003

1

Publications

1

Formation of polycrystalline silicon germanium/HfO2 gate stack structure using inductively coupled plasma etching

Jinghao Chen, K. M. Tan, Nan Wu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 11 citations

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