Statistics
Publications
3
Citations
86
H-Index
3
Active since
1998
Yao-Zhi Hu is an author specializing in materials science, spectroscopic ellipsometry, and materials engineering.
Publications per year
1998–2001
3
3
Characterization of high-K dielectric ZrO2 films annealed by rapid thermal processing
Yao-Zhi Hu, Sing-Pin Tay · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 45 citations
Natural Sciences, Materials Engineering, Materials Science +17
Spectroscopic ellipsometry investigation of silicide formation by rapid thermal process
Yao-Zhi Hu, Sing Pin Tay · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 10 citations
Natural Sciences, Materials Engineering, Materials Science +17
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