Concepedia

Shinichi Kanna

SK

Statistics

Publications

3

Citations

72

H-Index

3

Active since

2006

Affiliations

Fujifilm (Japan)(Current)

Shinichi Kanna is an author at Fujifilm (Japan) specializing in electronic materials, materials engineering, and thin film resist processing.

Publications per year

2006–2008

3

Publications

3

Development of materials and processes for double patterning toward 32- nm node 193- nm immersion lithography process

Shinji Tarutani, Hideaki Tsubaki, Shinichi Kanna · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 35 citations

, , +7

Development of Materials and Processes for Double Patterning toward 32nm Node ArF Immersion Lithography

Shinji Tarutani, Hideaki Tsubaki, Shinichi Kanna · Journal of Photopolymer Science and Technology · 2008 · 26 citations · Full text

, , +8

Materials and process parameters on ArF immersion defectivity study

Shinichi Kanna, Haruki Inabe, Kei Yamamoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

, , +9

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