Concepedia

Haruki Inabe

HI

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Publications

1

Citations

11

H-Index

1

Active since

2006

Affiliations

Fujifilm (Japan)(Current)

Haruki Inabe is an author at Fujifilm (Japan) specializing in resist patterning, surface engineering, and thin film resist processing.

Publications per year

2006–2006

1

Publications

1

Materials and process parameters on ArF immersion defectivity study

Shinichi Kanna, Haruki Inabe, Kei Yamamoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

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