Vivek Bakshi

High conversion efficiency microscopic tin-doped droplet target laser-plasma source for EUVL

Chiew-Seng Koay, Simi George, Kazutoshi Takenoshita et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 33 citations

High Conversion Efficiency, Engineering, Physics +13

Debris characterization and mitigation from microscopic laser-plasma tin-doped droplet EUV sources

Kazutoshi Takenoshita, Chiew-Seng Koay, Somsak Teerawattansook et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 26 citations

Materials Science, Debris Particles, Engineering +14

Simulation and optimization of DPP hydrodynamics and radiation transport for EUV lithography devices

A. Hassanein, V. Sizyuk, V. I. Tolkach et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 24 citations

Engineering, Electron-beam Lithography, Target Fabrication +24

An investigation of local thermodynamic equilibrium in an argon plasma jet at atmospheric pressure

Vivek Bakshi, R. J. Kearney · Journal of Quantitative Spectroscopy and Radiative Transfer · 1989 · 21 citations

Engineering, Aerospace Engineering, Local Thermodynamic Equilibrium +6

Measurement of stark width of some Ar I transitions in A d.c. argon plasma jet at atmospheric pressure

Vivek Bakshi, R. J. Kearney · Journal of Quantitative Spectroscopy and Radiative Transfer · 1989 · 20 citations

Stark Width, Engineering, Physics +6