Statistics
Publications
3
Citations
75
H-Index
3
Active since
1991
Affiliations
Kouhei Hashimoto is an author at Japan Advanced Institute of Science and Technology specializing in natural sciences, surface oxidation, and materials chemistry.
Publications per year
1991–2005
3
3
Contamination removal from EUV multilayer using atomic hydrogen generated by heated catalyzer
Hiroaki Oizumi, Hiromasa Yamanashi, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 32 citations
Natural Sciences, Materials Engineering, Materials Science +17
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