Statistics
Publications
5
Citations
148
H-Index
5
Active since
2011
Steffen Leopold is an author at Technische Universität Ilmenau specializing in materials science, materials engineering, and nanotechnology.
Publications per year
2011–2017
5
5
Formation of silicon grass: Nanomasking by carbon clusters in cyclic deep reactive ion etching
Steffen Leopold, Christoph Dr.-Ing. Kremin, Angela Ulbrich et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 33 citations
1–5 of 5