3
Publications
120
Citations
3
H-Index
2006
Active since
Affiliations
Technische Universität Ilmenau(Current)
Christoph Dr.-Ing. Kremin is an author at Technische Universität Ilmenau specializing in microelectronics, materials science, and applied physics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationPhysicsChemistryMicrofluidicsNanomaterialsNanotechnology
Publications per year
2006–2011
3
3
Formation of silicon grass: Nanomasking by carbon clusters in cyclic deep reactive ion etching
Steffen Leopold, Christoph Dr.-Ing. Kremin, Angela Ulbrich et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 33 citations
Rows per page
1–3 of 3