6
Publications
326
Citations
6
H-Index
2005
Active since
Philip Paul is an author at IBM Research - Zurich specializing in materials science, engineering, and microfabrication.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicrofabricationSurface ScienceMicroelectronicsElectronic PackagingChemistryBiophysicsMicroscopy
Publications per year
2005–2017
6
6
Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology
Lin Lee Cheong, Philip Paul, Felix Holzner et al. · Nano Letters · 2013 · 82 citations
Rapid turnaround scanning probe nanolithography
Philip Paul, Armin W. Knoll, Felix Holzner et al. · Nanotechnology · 2011 · 80 citations
Rows per page
1–5 of 6