Lin Lee Cheong

Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology

Lin Lee Cheong, Philip Paul, Felix Holzner et al. · Nano Letters · 2013 · 82 citations

Engineering, Electron-beam Lithography, Chemistry +18

Sub-5keV electron-beam lithography in hydrogen silsesquioxane resist

Vitor R. Manfrinato, Lin Lee Cheong, Huigao Duan et al. · Microelectronic Engineering · 2011 · 24 citations

Engineering, Electron-beam Lithography, Beam Lithography +4

Thermal probe nanolithography: in-situ inspection, high-speed, high-resolution, 3D

Felix Holzner, Philip Paul, M. Despont et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 16 citations · Full text

EUV processing and characterization for BEOL

Nicole Saulnier, Yongan Xu, Wenhui Wang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 16 citations

Computational Lithography, Engineering, Electron-beam Lithography +17

Three-dimensional photonic crystals by large-area membrane stacking

Ling Lü, Lin Lee Cheong, Henry I. Smith et al. · Optics Letters · 2012 · 13 citations · Full text

Photonic Device, Photonics, Engineering +15