10
Publications
443
Citations
10
H-Index
2011
Active since
Felix Holzner is an author at IBM Research - Zurich specializing in engineering, applied physics, and microfabrication.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicrofabricationNanomaterialsNanotechnologyNanofabricationNanomanufacturingElectronic PackagingNanolithography
Publications per year
2011–2018
10
10
Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology
Lin Lee Cheong, Philip Paul, Felix Holzner et al. · Nano Letters · 2013 · 82 citations
Rapid turnaround scanning probe nanolithography
Philip Paul, Armin W. Knoll, Felix Holzner et al. · Nanotechnology · 2011 · 80 citations
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