Concepedia

Karen Chu

KC

4

Publications

190

Citations

4

H-Index

1999

Active since

Affiliations

University of California, Los Angeles(Current)

Massachusetts Institute of Technology

Karen Chu is an author at University of California, Los Angeles specializing in applied physics, materials science, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsChemistrySurface ScienceElectronic DevicesElectrical InsulationMaterials EngineeringElectrical Engineering

Publications per year

1999–2002

4

Publications

4

Rapid thermal chemical vapor deposition of zirconium oxide for metal-oxide-semiconductor field effect transistor application

Jane P. Chang, You-Sheng Lin, Karen Chu · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 101 citations

Materials Science, Semiconductors, Electrical Engineering +15

Material and electrical characterization of carbon-doped Ta2O5 films for embedded dynamic random access memory applications

Karen Chu, Jane P. Chang, M. L. Steigerwald et al. · Journal of Applied Physics · 2002 · 41 citations

Materials Engineering, Materials Science, Electrical Engineering +14

Thermal Decomposition of Low Dielectric Constant Pulsed Plasma Fluorocarbon Films: I. Effect of Precursors and Substrate Temperature

Brett A. Cruden, Karen Chu, Karen K. Gleason et al. · Journal of The Electrochemical Society · 1999 · 34 citations

Engineering, Chemistry, Low Dielectric Constant +20

Thermal Decomposition of Low Dielectric Constant Pulsed Plasma Fluorocarbon Films: II. Effect of Postdeposition Annealing and Ambients

Brett A. Cruden, Karen Chu, Karen K. Gleason et al. · Journal of The Electrochemical Society · 1999 · 14 citations

Engineering, Chemistry, Low Dielectric Constant +22

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