Concepedia

You-Sheng Lin

YL

4

Publications

294

Citations

4

H-Index

2001

Active since

Affiliations

University of California, Los Angeles(Current)

You-Sheng Lin is an author at University of California, Los Angeles specializing in engineering, microelectronics, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectrical EngineeringThin FilmsSurface ScienceCrystalline DefectsOxide SemiconductorsPhysics

Publications per year

2001–2008

4

Publications

4

Rapid thermal chemical vapor deposition of zirconium oxide for metal-oxide-semiconductor field effect transistor application

Jane P. Chang, You-Sheng Lin, Karen Chu · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 101 citations

Materials Science, Semiconductors, Electrical Engineering +15

Highly conformal ZrO2 deposition for dynamic random access memory application

Jane P. Chang, You-Sheng Lin · Journal of Applied Physics · 2001 · 83 citations

Materials Science, Non-volatile Memory, Engineering +15

Ion-enhanced chemical etching of HfO2 for integration in metal–oxide–semiconductor field effect transistors

Lin Sha, Ragesh Puthenkovilakam, You-Sheng Lin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 69 citations

Engineering, Ion-enhanced Chemical Etching, Pure Cl2 Plasma +20

Novel 3-D structure for ultra high density flash memory with VRAT (Vertical-Recess-Array-Transistor) and PIPE (Planarized Integration on the same PlanE)

Jiyoung Kim, Augustin J. Hong, Masaaki Ogawa et al. · 2008 · 41 citations

Non-volatile Memory, Electrical Engineering, Engineering +13

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