Y. Todokoro

Nitridation of silicon oxide layers by nitrogen plasma generated by low energy electron impact

H. Kobayashi, Toshiko Mizokuro, Yoshihiro Nakato et al. · Applied Physics Letters · 1997 · 46 citations

Engineering, Materials Engineering, Materials Science +16

Passivation of trap states in polycrystalline Si by cyanide treatments

Emi Kanazaki, K. Yoneda, Y. Todokoro et al. · Solid State Communications · 1999 · 26 citations

Engineering, Materials Engineering, Materials Science +13

Double-layer resist films for submicrometer electron-beam lithography

Y. Todokoro · IEEE Transactions on Electron Devices · 1980 · 22 citations

Engineering, Electrical Engineering, Materials Science +17

A novel silicon containing chemical amplification resist for electron beam lithography

H. Watanabe, Y. Todokoro, M. Inoue · Microelectronic Engineering · 1991 · 13 citations

Engineering, Materials Engineering, Materials Science +16

Transparent phase shifting mask

H. Watanabe, Y. Todokoro, Masayuki Inoue · 2002 · 13 citations

Engineering, Computer Engineering, Electrical Engineering +15