Concepedia

Hans-Juergen Engelmann

HE

Statistics

Publications

2

Citations

35

H-Index

2

Active since

2002

Affiliations

Carl Zeiss (Germany)(Current)

Hans-Juergen Engelmann is an author at Carl Zeiss (Germany) specializing in engineering, nanofabrication, and carbon materials.

Top concepts

Publications per year

2002–2008

2

Publications

2

Physical failure analysis in semiconductor industry—challenges of the copper interconnect process

Ehrenfried Zschech, Eckhard Langer, Hans-Juergen Engelmann et al. · Materials Science in Semiconductor Processing · 2002 · 25 citations

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Novel Carbon-Cage-Based Ultralow-$k$ Materials: Modeling and First Experiments

K. Zagorodniy, Dmytro Chumakov, Christine Täschner et al. · IEEE Transactions on Semiconductor Manufacturing · 2008 · 10 citations

, , +18

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