Joo-Tae Moon

Synchronous Pulse Plasma Operation upon Source and Bias Radio Frequencys for Inductively Coupled Plasma for Highly Reliable Gate Etching Technology

K. Tokashiki, Hong Cho, S. Banna et al. · Japanese Journal of Applied Physics · 2009 · 35 citations

Engineering, Electrical Engineering, Physics +17

High temperature platinum etching using Ti mask layer

Hyoun-Woo Kim, Byong-Sun Ju, B.Y. Nam et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 28 citations

Engineering, Materials Engineering, Materials Science +17

Integration and Electrical Properties of Carbon Nanotube Array for Interconnect Applications

Youngmoon Choi, Sunwoo Lee, Hong Sik Yoon et al. · 2006 Sixth IEEE Conference on Nanotechnology · 2006 · 23 citations

Engineering, Electrical Engineering, Materials Science +17

Effects of Nonionic Surfactants on Oxide-to-Polysilicon Selectivity during Chemical Mechanical Polishing

Jae-Dong Lee, Young-Rae Park, Bo Un Yoon et al. · Journal of The Electrochemical Society · 2002 · 22 citations

Natural Sciences, Chemical Engineering, Materials Science +17

A study on the Pt electrode etching for 0.15 μm technologies

Hyoun-Woo Kim, Byong-Sun Ju, Chang-Jin Kang et al. · Microelectronic Engineering · 2002 · 20 citations

Engineering, Materials Engineering, Materials Science +14