Heui Jae Pahk

Ultra precision positioning system for servo motor–piezo actuator using the dual servo loop and digital filter implementation

Heui Jae Pahk, Dong Sung Lee, Jongho Park · International Journal of Machine Tools and Manufacture · 2001 · 121 citations

Motion Control, Engineering, Digital Filter Implementation +6

A new technique for volumetric error assessment of CNC machine tools incorporating ball bar measurement and 3D volumetric error model

Heui Jae Pahk, Young Sam Kim, Joon Hee Moon · International Journal of Machine Tools and Manufacture · 1997 · 98 citations

Engineering, Measurement, Calibration +13

Fast Analysis of Film Thickness in Spectroscopic Reflectometry using Direct Phase Extraction

Kwangrak Kim, Soonyang Kwon, Heui Jae Pahk · Current Optics and Photonics · 2017 · 34 citations · Full text

Optical Materials, Engineering, Microscopy +25

Co-axial spectroscopic snap-shot ellipsometry for real-time thickness measurements with a small spot size

Seung-Woo Lee, Sin Yong Lee, Garam Choi et al. · Optics Express · 2020 · 30 citations · Full text

Volumetric thin film thickness measurement using spectroscopic imaging reflectometer and compensation of reflectance modeling error

Kwangrak Kim, Seongryong Kim, Soonyang Kwon et al. · International Journal of Precision Engineering and Manufacturing · 2014 · 29 citations

Engineering, Optical Properties, Spectroscopy +10