Ultra precision positioning system for servo motor–piezo actuator using the dual servo loop and digital filter implementation - Concepedia

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Ultra precision positioning system for servo motor–piezo actuator using the dual servo loop and digital filter implementation

121

Citations

3

References

2001

Year

Heui Jae Pahk, Dong Sung Lee, Jongho Park

International Journal of Machine Tools and Manufacture

Motion ControlEngineeringDigital Filter ImplementationMechatronicsMechanical SystemsActuationUltra PrecisionDual Servo LoopMicropositioning

References

	Year	Citations

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